论文信息 - Features of microstructure of ZrN, Si 3 N 4 and ZrN/SiN x nanoscale films irradiated by Xe ions - 字舞流文

Features of microstructure of ZrN, Si 3 N 4 and ZrN/SiN x nanoscale films irradiated by Xe ions

J. O’Connell | V. Uglov | G. Abadias | V. Shymanski | A. Vuuren | J. Neethling | V. Skuratov | S. Zlotski | I. Saladukhin | I. Safronov