论文信息 - Modification of MeV He Implantation-Induced Cavities in Silicon by Hydrogen Plasma Treatment - 字舞流文

Modification of MeV He Implantation-Induced Cavities in Silicon by Hydrogen Plasma Treatment

S. Ashok | M. Barthe | E. Ntsoenzok | D. Alquier | C. Liu | P. Desgardin | M. Ruault | A. Vengurlekar