Properties of Large Grain-Size poly-Si Films by Catalytic Chemical Sputtering
暂无分享，去创建一个
[1] A. Masuda,et al. Catalytic Chemical Sputtering: A Novel Method for Obtaining Large-Grain Polycrystalline Silicon , 2001 .
[2] M. Gemmi,et al. Very high frequency hydrogen plasma treatment of growing surfaces: a study of the p-type amorphous to microcrystalline silicon transition , 2000 .
[3] A. Masuda,et al. Transport mechanism of deposition precursors in catalytic chemical vapor deposition studied using a reactor tube , 2000 .
[4] S. Vepřek,et al. The preparation of thin layers of Ge and Si by chemical hydrogen plasma transport , 1968 .
[5] R. Crandall,et al. The Influence of Electrons From the Filament on the Material Properties of Hydrogenated Amorphous Silicon Grown by the Hot-Wire Chemical Vapor Deposition Technique , 1998 .