히트 파이프를 이용한 나노임프린트용 대면적 핫플레이트의 온도 균일화 방안

A numerical investigation is made of thermal control of a hot plate device specially designed for thermal nanoimprint lithography. The technical requirements for this hot plate are rapid heating capability and high temperature uniformity together with strength against high stamping pressure. In order to satisfy these requirements, design of precise thermal control scheme is essential. In this study, a numerical experiment is conducted to simulate unsteady thermal behaviour of hot plate under control. This article introduce the possibility and reality of the thermal control on the hot plate using a CFD code. Heat pipes is used to ensure high temperature uniformity. Parallel Numerical computations are conducted for assessing the feasibility of the hot plate(240×240㎟) equipped with a series of parallel cartridge heaters and heat pipes. The optimal thermal design is attempted numerically.