A Compact 267 GHz Shorted Annular Ring Antenna With Surface Wave Suppression in 130 nm SiGe BiCMOS

In this letter, a compact shorted annular ring reduced surface-wave (SAR-RSW) antenna is designed and fabricated in 130 nm SiGe BiCMOS process at 267 GHz. The shorted annular ring is designed to reduce surface wave, and a rectangular slot is etched for miniaturization. The die area of proposed antenna is 450 × 600 μm<sup>2 </sup>. Compared to the conventional microstrip antenna, the antenna shows higher gain around 1.8 dBi at 267 GHz. The measurement bandwidth is 17 GHz (252–269 GHz) under the condition of <inline-formula> <tex-math notation="LaTeX">$S_{11}$</tex-math></inline-formula> less than −10 dB. Both the measurement and simulation results agree well.

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