Molybdenum Nitride Films: Crystal Structures, Synthesis, Mechanical, Electrical and Some Other Properties

Among transition metal nitrides, molybdenum nitrides have been much less studied even though their mechanical properties as well as their electrical and catalytic properties make them very attractive for many applications. The δ-MoN phase of hexagonal structure is a potential candidate for an ultra-incompressible and hard material and can be compared with c-BN and diamond. The predicted superconducting temperature of the metastable MoN phase of NaCl-B1-type cubic structure is the highest of all refractory carbides and nitrides. The composition of molybdenum nitride films as well as the structures and properties depend on the parameters of the process used to deposit the films. They are also strongly correlated to the electronic structure and chemical bonding. An unusual mixture of metallic, covalent and ionic bonding is found in the stoichiometric compounds.

[1]  A. Bessaudou,et al.  A reduction–nitridation process of molybdenum films in expanding microwave plasma: Crystal structure of molybdenum nitrides , 2015 .

[2]  U. Schmid,et al.  Impact of sputter deposition parameters on molybdenum nitride thin film properties , 2015 .

[3]  Boon Siang Yeo,et al.  Efficient hydrogen evolution reaction catalyzed by molybdenum carbide and molybdenum nitride nanocatalysts synthesized via the urea glass route , 2015 .

[4]  M. Leoni,et al.  Crystal structure and microstructural changes of molybdenum nitrides traced during catalytic reaction by in situ X-ray diffraction studies. , 2014, Physical chemistry chemical physics : PCCP.

[5]  Etsuko Fujita,et al.  Recent developments in transition metal carbides and nitrides as hydrogen evolution electrocatalysts. , 2013, Chemical communications.

[6]  F. Schüth,et al.  Molybdenum-based catalysts for the decomposition of ammonia: In situ X-ray diffraction studies, microstructure, and catalytic properties , 2013 .

[7]  K. Khojier,et al.  Annealing temperature effect on the mechanical and tribological properties of molybdenum nitride thin films , 2013, Journal of Nanostructure in Chemistry.

[8]  A. Bessaudou,et al.  A Thermochemical Process Using Expanding Plasma for Nitriding Thin Molybdenum Films at Low Temperature , 2012 .

[9]  Huisheng Peng,et al.  Controlling Crystal Structure and Oxidation State in Molybdenum Nitrides through Epitaxial Stabilization , 2011 .

[10]  D. Choi,et al.  Synthesis and Characterization of Nanostructured Niobium and Molybdenum Nitrides by a Two‐Step Transition Metal Halide Approach , 2011 .

[11]  A. Bessaudou,et al.  Expanding microwave plasma process for thin molybdenum films nitriding: Nitrogen diffusion and structure investigations , 2011 .

[12]  L. Kiwi-Minsker,et al.  UvA-DARE ( Digital Academic Repository )-Molybdenum nitride : synthesis mechanism and catalytic response in the gas phase hydrogenation of p-chloronitrobenzene , 2011 .

[13]  Wei Chen,et al.  Elastic Properties and Electronic Structures of 4d- and 5d-Transition Metal Mononitrides , 2010 .

[14]  E. Zhao,et al.  Displacive phase transition, structural stability, and mechanical properties of the ultra‐incompressible and hard MoN by first principles , 2010 .

[15]  Qingfeng Ge,et al.  Tribological investigation of adaptive Mo2N/MoS2/Ag coatings with high sulfur content , 2009 .

[16]  P. Goudeau,et al.  Investigations on a nitriding process of molybdenum thin films exposed to (Ar–N2–H2) expanding microwave plasma , 2009 .

[17]  Brandon Luster,et al.  Adaptive Mo2N/MoS2/Ag Tribological Nanocomposite Coatings for Aerospace Applications , 2008 .

[18]  J. Hargreaves,et al.  The influence of phase and morphology of molybdenum nitrides on ammonia synthesis activity and reduction characteristics , 2008 .

[19]  S. Goumri‐Said,et al.  Structure and mechanical stability of molybdenum nitrides : A first-principles study , 2007 .

[20]  M. Nagai Transition-metal nitrides for hydrotreating catalyst—Synthesis, surface properties, and reactivities , 2007 .

[21]  T. Suszko,et al.  Thin films of Mo2N/Ag nanocomposite—the structure, mechanical and tribological properties , 2006 .

[22]  L. Kienle,et al.  Synthesis and characterisation of hexagonal molybdenum nitrides , 2006 .

[23]  P. McMillan,et al.  Crystal structure and high-pressure properties of γ-Mo2N determined by neutron powder diffraction and X-ray diffraction , 2006 .

[24]  S. Gong,et al.  Catalytic Behaviors of -Mo 2 N 0.78 as a Hydrodesulfurization Catalyst , 2006 .

[25]  K. Inumaru,et al.  Synthesis and Characterization of Superconducting β‐Mo2N Crystalline Phase on a Si Substrate: An Application of Pulsed Laser Deposition to Nitride Chemistry. , 2006 .

[26]  K. Inumaru,et al.  Synthesis and Characterization of Superconducting β‐Mo2N Crystalline Phase on a Si Substrate: An Application of Pulsed Laser Deposition to Nitride Chemistry. , 2005 .

[27]  S. Mändl,et al.  Nitride formation in transition metals during high fluence–high temperature implantation , 2005 .

[28]  P. Alén Atomic Layer Deposition of TaN, NbN, and MoN Films for Cu Metallizations , 2005 .

[29]  Huiqin Ling,et al.  Diffusion barrier performances of thin Mo, Mo-N and Mo/Mo-N films between Cu and Si , 2005 .

[30]  C. Au,et al.  On the catalytic nature of VN, Mo2N, and W2N nitrides for NO reduction with hydrogen , 2004 .

[31]  Ray Y. Lin,et al.  Amorphous molybdenum nitride thin films prepared by reactive sputter deposition , 2004 .

[32]  L. Kleinman,et al.  Theoretical study of structural and electronic properties ofδ-MoN , 2004 .

[33]  K. Leinenweber,et al.  Determination of the crystal structure of d-MoN by neutron diffraction , 2004 .

[34]  Walter Assmann,et al.  High temperature nitrogen plasma immersion ion implantation into molybdenum , 2004 .

[35]  J. E. Lowther Lattice model for the properties of non-stoichiometric cubic and hexagonal molybdenum nitride , 2004 .

[36]  K. Leinenweber,et al.  High-pressure synthesis and study of low-compressibility molybdenum nitride (MoN and MoN1-x) phases , 2003 .

[37]  W. Assmann,et al.  Phase formation and diffusion after nitrogen PIII in molybdenum , 2003 .

[38]  Nicolas Martin,et al.  Structural and mechanical properties of chromium nitride, molybdenum nitride, and tungsten nitride thin films , 2003 .

[39]  J. Takada,et al.  Microstructure of a Molybdenum Nitride Layer Formed by Nitriding Molybdenum Metal , 2001 .

[40]  X. Bao,et al.  Preparation and adsorption properties of Mo2N model catalyst , 2000 .

[41]  G. Hart,et al.  Phonon and elastic instabilities in MoC and MoN , 1999, cond-mat/9906281.

[42]  J. D. Wu,et al.  Surface nitridation of transition metals by pulsed laser irradiation in gaseous nitrogen , 1997 .

[43]  R. Gordon,et al.  Low-temperature atmospheric-pressure metal−organic chemical vapor deposition of molybdenum nitride thin films , 1996 .

[44]  S. Major,et al.  Deposition of molybdenum nitride thin films by r.f. reactive magnetron sputtering , 1996 .

[45]  F. Bouillon,et al.  Synthesis and characterization of thin-film molybdenum nitrides , 1993 .

[46]  A. Perry,et al.  Crystal structure of molybdenum nitride films made by reactive cathodic arc evaporation , 1992 .

[47]  K. Saito,et al.  Superconductivity and structural changes of nitrogen-ion implanted Mo thin films , 1987 .

[48]  N. Savvides High Tc superconducting B1 phase MoN films prepared by low‐energy ion‐assisted deposition , 1987 .

[49]  Kimura,et al.  Electronic structures of B1 MoN, fcc Mo2N, and hexagonal MoN. , 1985, Physical review. B, Condensed matter.

[50]  Klein,et al.  Electronic properties of transition-metal nitrides: The group-V and group-VI nitrides VN, NbN, TaN, CrN, MoN, and WN. , 1985, Physical review. B, Condensed matter.

[51]  G. Linker,et al.  Superconductivity in MoN films with NaCl structure , 1984 .

[52]  P. Dickens,et al.  Thermochemistry of hydrogen molybdenum bronze phases HxMoO3 , 1979 .

[53]  M. D. Lyutaya Formation of nitrides of the Group VI transition metals , 1979 .

[54]  P. Ettmayer,et al.  The molybdenum-nitrogen phase diagram , 1978 .

[55]  J. Thornton High Rate Thick Film Growth , 1977 .

[56]  L. Toth Transition Metal Carbides and Nitrides , 1971 .

[57]  V. Guntur Molybdenum Nitride Films in the Back Contact Structure of Flexible Substrate CdTe Solar Cells , 2011 .

[58]  D. McKay Catalysis over molybdenum containing nitride materials , 2008 .

[59]  H. Kattelus,et al.  Stress control of sputter-deposited Mo-N films for micromechanical applications , 2002 .

[60]  S. Oyama Introduction to the chemistry of transition metal carbides and nitrides , 1996 .

[61]  V. Zhukov,et al.  Electronic Structure of Refractory Carbides and Nitrides: Electronic structure and interatomic interactions in transition metal nitrides , 1994 .

[62]  R. Ward,et al.  PREPARATION OF $beta$-MOLYBDENUM NITRIDE. , 1970 .