Management Method for semiconductor manufacturung equipment

PURPOSE: A method for managing a semiconductor fabrication facility is provided to compare a wafer counting data which counts processed wafers with a maintenance-related data set in a host computer, generate an alarming message based on a result of the comparison or temporarily stop a fabrication facility for thereby preventing a process error based on a continuous operation of the system. CONSTITUTION: A host computer receives a first maintenance-related data from a semiconductor fabrication facility(S100). The host computer searches a first reference maintenance-related data set to correspond with an ID of a corresponding semiconductor fabrication facility from a database and compares with the received first maintenance-related data(S110). The host computer judges whether a maintenance of a corresponding semiconductor fabrication facility is performed(S130). The host computer compares the second maintenance-related data with the second reference maintenance-related data(S140). The host computer inter-locks a corresponding semiconductor fabrication system for forcibly stopping the operation of the same if the second maintenance-related data is larger than or the same as the second reference maintenance-related data(S150). A maintenance-related data is reset, and the reset signal is transmitted to the host computer(S180).