Intelligent clothing based on MEMS and its making method

The present invention discloses a preparation method thereof smart clothing MEMS-based, may be used to acquire ECG, heart sounds and other physiological parameters of the smart garment function is achieved by a flexible film and a textile sensor array integrated manner: First, , the wafer using MEMS technology are making sound / electric transducer and an electrical interconnect structure. Next, the wafer is etched on the reverse side of the silicon island pattern, so that mutual isolation between each sensor. Again, the positive and negative rotation of the wafer coated with the polymer, and is photolithographically patterning a sensor window as well as the sewing hole, i.e., to obtain a flexible thin film sensor array. Polymer protect the sensor, the sewing holes may be used to make sensors of the sensor array of conductive fibers and textile suture in one film, i.e., to obtain specific functional smart clothing. The present invention employs MEMS fabrication process, good repeatability, high reliability, high volume manufacturing and low cost, has a wide application prospect.