论文信息 - Preparation of CaTiO3 heteroepitaxial thin films by excimer laser deposition

Preparation of CaTiO3 heteroepitaxial thin films by excimer laser deposition

CaTiO3 thin films were prepared by a 193 nm ArF excimer laser deposition method. Epitaxial CaTiO3 thin films were obtained on SrTiO3 (100) substrate and YBa2Cu3Oy (001) deposited on MgO (100) single‐crystal substrate. The grown CaTiO3 thin films orientated to (010) direction and the unit cell of CaTiO3 rotated 45° around the [100] axis of the SrTiO3 substrate. It also happened in CaTiO3/YBa2Cu3Oy/MgO system. The static dielectric constant was 120 at room temperature and reached 175 at lower temperatures.

T. Hirano | A. Fujishima | Takeshi Kobayashi | Tatsuhiko Fujii

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