Numerical modelling of impact rupture in polysilicon microsystems

A 2D geometrical model for polycrystals was developed in this paper by means of a Voronoi tessellation in which each crystal is assumed to be elastic anisotropic. An implicit–explicit FE dynamic code coupled with an automatic procedure for the introduction of cohesive interface elements with cohesive traction-jump softening laws was used in order to simulate intergranular and transgranular fracture. Accidental drop simulations were performed with the principal aim to capture the maximum acceleration and to simulate local rupture phenomena in MEMS. In order to reduce the excessive problem size, a simplified, decoupled global–local three level multi-scale approach was used.

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