Nanolithography: Processing Methods for Nanofabrication Development

The present review article deals with the detailedintroduction and classification of lithography techniques. Nanolithography is the branch of nanotechnology through which nanofabrication of the patterns or structures can be done very easily. Nanolithography can be considered as a revolutionizing advancement in nanotechnology. Nanolithography has various techniques and each technique has its own advantages and applications in different fields. This review also summarizes different types of direct and indirect techniques of fabrications using various substrates, photo resists and photo masks. The present article helps to know about the different methods or ways of fabricating nano patterns with ease or difficulty depending upon the technique. Also in this review, the advantages, disadvantages and applications of each lithography techniques are discussed.

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