Microfabrication of PDMS microchannels using SU-8/PMMA moldings and their sealing to polystyrene substrates

In this paper we show increased interfacial bonding of a photoresist (SU-8) deposited onto highly polished poly(methyl methacrylate) (PMMA) substrates containing a UV absorber. We also demonstrate the facile sealing/covalent bonding of 100 µm × 20 µm PDMS replica microchannels, made from these PMMA/SU-8 moldings, onto thermally polymerized styrene. Sealing was achieved through radio-frequency plasma discharge (RFPD) oxygen plasma treatment.

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