A negative-capacitance equivalent circuit model for parallel-plate capacitive-gap-transduced micromechanical resonators

A small-signal equivalent circuit for parallelplate capacitive-gap-transduced micromechanical resonators is introduced that employs negative capacitance to model the dependence of resonance frequency on electrical stiffness in a way that facilitates circuit analysis, that better elucidates the mechanisms behind certain potentially puzzling measured phenomena, and that inspires circuit topologies that maximize performance in specific applications. For this work, a micromechanical disk resonator serves as the vehicle with which to derive the equivalent circuits for both radial-contour and wine-glass modes, which are then used in circuit simulations (via simulation) to match measurements on actual fabricated devices. The new circuit model not only correctly predicts the dependence of electrical stiffness on the impedances loading the input and output electrodes of parallel-plate capacitive- gap-transduced micromechanical device, but does so in a visually intuitive way that identifies current drive as most appropriate for applications that must be stable against environmental perturbations, such as acceleration or power supply variations. Measurements on fabricated devices confirm predictions by the new model of up to 4× improvement in frequency stability against dc-bias voltage variations for contour- mode disk resonators as the resistance loading their ports increases. By enhancing circuit visualization, this circuit model makes more obvious the circuit design procedures and topologies most beneficial for certain mechanical circuits, e.g., filters and oscillators.