A Review of Thin-Film Magnetoelastic Materials for Magnetoelectric Applications

Since the revival of multiferroic laminates with giant magnetoelectric (ME) coefficients, a variety of multifunctional ME devices, such as sensor, inductor, filter, antenna etc. have been developed. Magnetoelastic materials, which couple the magnetization and strain together, have recently attracted ever-increasing attention due to their key roles in ME applications. This review starts with a brief introduction to the early research efforts in the field of multiferroic materials and moves to the recent work on magnetoelectric coupling and their applications based on both bulk and thin-film materials. This is followed by sections summarizing historical works and solving the challenges specific to the fabrication and characterization of magnetoelastic materials with large magnetostriction constants. After presenting the magnetostrictive thin films and their static and dynamic properties, we review micro-electromechanical systems (MEMS) and bulk devices utilizing ME effect. Finally, some open questions and future application directions where the community could head for magnetoelastic materials will be discussed.

[1]  Sebastian Zabel,et al.  Microelectromechanical magnetic field sensor based on ΔE effect , 2014 .

[2]  Eckhard Quandt,et al.  Magnetoelectric thin film composites with interdigital electrodes , 2013 .

[3]  Zhuo Xu,et al.  Composition and phase dependence of the intrinsic and extrinsic piezoelectric activity of domain engineered (1-x)Pb(Mg(13)Nb(23))O(3)-xPbTiO(3) crystals. , 2010, Journal of applied physics.

[4]  Eckhard Quandt,et al.  Inverse bilayer magnetoelectric thin film sensor , 2016 .

[5]  S. Dong,et al.  Review of multi-layered magnetoelectric composite materials and devices applications , 2018 .

[6]  Marilyn Wun-Fogle,et al.  Magnetoelasticity of Fe–Ga and Fe–Al alloys , 2001 .

[7]  G. Srinivasan,et al.  Magnetoelectric microwave phase shifter , 2006 .

[8]  Alan J. Hurd,et al.  Review of sol-gel thin film formation , 1992 .

[9]  John G. Jones,et al.  Characterization of magnetomechanical properties in FeGaB thin films , 2018, Applied Physics Letters.

[10]  Haosu Luo,et al.  Giant Magnetoelectric Response from a Piezoelectric/Magnetostrictive Laminated Composite Combined with a Piezoelectric Transformer , 2008 .

[11]  Mikko Ritala,et al.  Atomic layer deposition (ALD): from precursors to thin film structures , 2002 .

[12]  Michael H. Walmer,et al.  Sm2(Co,Fe,Cu,Zr)17 magnets for use at temperature ⩾400 °C , 1998 .

[13]  Guomin Yang,et al.  Tunable Miniaturized Patch Antennas With Self-Biased Multilayer Magnetic Films , 2009, IEEE Transactions on Antennas and Propagation.

[14]  Jens Reermann,et al.  Tuning fork for noise suppression in magnetoelectric sensors , 2016 .

[15]  H. Fujimori,et al.  An accurate measurement of magnetostriction of thin films by using a new nano-indentation system , 1999, IEEE International Magnetics Conference.

[16]  Marilyn Wun-Fogle,et al.  Magnetostriction of ternary Fe–Ga–X (X=C,V,Cr,Mn,Co,Rh) alloys , 2007 .

[17]  Andrew C. Tam,et al.  A new high-precision optical technique to measure magnetostriction of a thin magnetic film deposited on a substrate , 1989 .

[18]  Eckhard Quandt,et al.  Advanced magneto-optical microscopy: Imaging from picoseconds to centimeters - imaging spin waves and temperature distributions (invited) , 2016 .

[19]  James F. Scott,et al.  Physics and Applications of Bismuth Ferrite , 2009 .

[20]  Sang Ho Lim,et al.  Magnetostriction of Sm-Fe and Sm-Fe-B thin films fabricated by RF magnetron sputtering , 1998 .

[21]  R. Ramesh,et al.  Multiferroics: progress and prospects in thin films. , 2007, Nature materials.

[22]  R. M. Bozorth,et al.  ANOMALOUS THERMAL EXPANSION AND MAGNETOSTRICTION OF SINGLE-CRYSTAL DYSPROSIUM , 1965 .

[23]  C. Nan,et al.  Recent Progress in Multiferroic Magnetoelectric Composites: from Bulk to Thin Films , 2011, Advanced materials.

[24]  John G. Jones,et al.  Integrated Tunable Magnetoelectric RF Inductors , 2020, IEEE Transactions on Microwave Theory and Techniques.

[25]  C. Nan,et al.  Multiferroic Magnetoelectric Composites: Historical Perspective, Status, and Future Directions , 2008, Progress in Advanced Dielectrics.

[26]  J. E. Stern,et al.  Magnetic force microscopy: General principles and application to longitudinal recording media , 1990 .

[27]  B. N. Das,et al.  Giant magnetostriction materials , 1991 .

[28]  Erik Jongewaard,et al.  A high Q piezoelectric resonator as a portable VLF transmitter , 2019, Nature Communications.

[29]  Nian X. Sun,et al.  A Portable Very Low Frequency (VLF) Communication System Based on Acoustically Actuated Magnetoelectric Antennas , 2020, IEEE Antennas and Wireless Propagation Letters.

[30]  Eric Summers,et al.  Effect of stress annealing on Galfenol and Alfenol magnetostrictive alloys , 2006, SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.

[31]  W. Sproul,et al.  Physical vapor deposition tool coatings , 1996 .

[32]  Nian X. Sun,et al.  Soft magnetism, magnetostriction, and microwave properties of FeGaB thin films , 2007 .

[33]  A. Zettl,et al.  Nanomechanical radio transmitter , 2008 .

[34]  Eduardo Fernández,et al.  Sensor Applications of Soft Magnetic Materials Based on Magneto-Impedance, Magneto-Elastic Resonance and Magneto-Electricity , 2014, Sensors.

[35]  A. Obraztsov,et al.  Chemical vapor deposition of thin graphite films of nanometer thickness , 2007 .

[36]  Jeffrey McCord,et al.  Picosecond wide-field magneto-optical imaging of magnetization dynamics of amorphous film elements , 2014 .

[37]  Nian X. Sun,et al.  A passive isolator realized by magnetoelectric laminate composites , 2018, Applied Physics Letters.

[38]  Jonathan D. Snodgrass,et al.  Optimized TERFENOL-D manufacturing processes , 1997 .

[39]  P. Curie Sur la symétrie dans les phénomènes physiques, symétrie d'un champ électrique et d'un champ magnétique , 1894 .

[40]  G. Sreenivasulu,et al.  A permendur-piezoelectric multiferroic composite for low-noise ultrasensitive magnetic field sensors , 2012 .

[41]  Robert Celotta,et al.  Scanning electron microscopy with polarization analysis (SEMPA) , 1990 .

[42]  Nian X. Sun,et al.  VOLTAGE CONTROL OF MAGNETISM IN MULTIFERROIC HETEROSTRUCTURES AND DEVICES , 2012 .

[43]  John G. Jones,et al.  Power-efficient voltage tunable RF integrated magnetoelectric inductors with FeGaB/Al2O3 multilayer films , 2014, 2014 IEEE MTT-S International Microwave Symposium (IMS2014).

[44]  D. M. Mattox,et al.  Chapter 8 – Arc Vapor Deposition , 2010 .

[45]  Marilyn Wun-Fogle,et al.  Magnetostrictive Properties of Galfenol Alloys Under Compressive Stress , 2002 .

[46]  M. Rinaldi,et al.  Tunable RF band-pass filters based on NEMS magnetoelectric resonators , 2016, 2016 IEEE MTT-S International Microwave Symposium (IMS).

[47]  Yoshiro Kakehashi,et al.  Systematic Variations of Magnetic Properties in 3d Transition Metal Alloys , 2013 .

[48]  Alexei D. Matyushov,et al.  Future Antenna Miniaturization Mechanism: Magnetoelectric Antennas , 2018, 2018 IEEE/MTT-S International Microwave Symposium - IMS.

[49]  Marc S. Weinberg,et al.  Low frequency mechanical antennas: Electrically short transmitters from mechanically-actuated dielectrics , 2017, 2017 IEEE International Symposium on Antennas and Propagation & USNC/URSI National Radio Science Meeting.

[50]  Eckhard Quandt,et al.  Mechanical-Resonance-Enhanced Thin-Film Magnetoelectric Heterostructures for Magnetometers, Mechanical Antennas, Tunable RF Inductors, and Filters , 2019, Materials.

[51]  Dominique Givord,et al.  Giant Magnetostrictive, Spring Magnet Type Multilayers and Torsion Based Microactuators , 1996 .

[52]  M. Hooker Properties of PZT-Based Piezoelectric Ceramics Between-150 and 250°C , 1998 .

[53]  Thomas E. Seidel,et al.  Thin film atomic layer deposition equipment for semiconductor processing , 2002 .

[54]  Kazuo Tsubouchi,et al.  AlN Material Constants Evaluation and SAW Properties on AlN/Al 2 O 3 and AlN/Si , 1981 .

[55]  Paul Muralt,et al.  Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications , 1999 .

[56]  Denys Makarov,et al.  Purely antiferromagnetic magnetoelectric random access memory , 2016, Nature Communications.

[57]  Gopalan Srinivasan,et al.  Ferrite-ferroelectric hybrid wave phase shifters , 2007 .

[58]  A. Hubert,et al.  Magnetic Domains: The Analysis of Magnetic Microstructures , 2014 .

[59]  Xing Mu,et al.  A study of high piezomagnetic (Fe-Ga/Fe-Ni) multilayers for magnetoelectric device , 2019, Journal of Alloys and Compounds.

[60]  N. Mathur,et al.  Multiferroic and magnetoelectric materials , 2006, Nature.

[61]  Shuxiang Dong,et al.  Enhanced Resonance Magnetoelectric Coupling in (1‐1) Connectivity Composites , 2017, Advanced materials.

[62]  B. Wagner,et al.  Giant magnetoelectric coefficients in (Fe90Co10)78Si12B10-AlN thin film composites , 2010 .

[63]  D. Viehland,et al.  Magnetoelectrics for magnetic sensor applications: status, challenges and perspectives , 2014 .

[64]  E. Klokholm,et al.  The measurement of magnetostriction in ferromagnetic thin films , 1976 .

[65]  R. Ramesh,et al.  Advances in magnetoelectric multiferroics , 2019, Nature Materials.

[66]  Alfredo García-Arribas,et al.  Thin-Film Magnetoimpedance Structures Onto Flexible Substrates as Deformation Sensors , 2017, IEEE Transactions on Magnetics.

[67]  Nian X. Sun,et al.  Highly Sensitive Magnetic Sensor based on Magnetoelectric Effect and Cross-Modulation Technique , 2019 .

[68]  Christine Kirchhof,et al.  Giant magnetoelectric effect in vacuum , 2013 .

[69]  Alexei D. Matyushov,et al.  NEMS Magnetoelectric Antennas for Biomedical Application , 2018, 2018 IEEE International Microwave Biomedical Conference (IMBioC).

[70]  Brigitte Maier,et al.  Electrodynamics Of Continuous Media , 2016 .

[71]  M. Rinaldi,et al.  Self-Biased 215MHz Magnetoelectric NEMS Resonator for Ultra-Sensitive DC Magnetic Field Detection , 2013, Scientific Reports.

[72]  Krishnamurthy Mahalingam,et al.  Magnetostriction, Soft Magnetism, and Microwave Properties in Co−Fe−C Alloy Films , 2019, Physical Review Applied.

[73]  B. S. Berry,et al.  Vibrating reed internal friction apparatus for films and foils , 1975 .

[74]  Christian J. Long,et al.  Energy harvesting properties of all-thin-film multiferroic cantilevers , 2011 .

[75]  J. P. Joule Esq.,et al.  XVII. On the effects of magnetism upon the dimensions of iron and steel bars , 1847 .

[76]  D. M. Mattox,et al.  Handbook of physical vapor deposition (PVD) processing , 2010 .

[77]  Xianfeng Liang,et al.  Novel Acoustically Actuated Magnetoelectric Antennas , 2018, 2018 IEEE International Symposium on Antennas and Propagation & USNC/URSI National Radio Science Meeting.

[78]  J. Suchtelen PRODUCT PROPERTIES : A NEW APPLICATION OF COMPOSITE MATERIALS , 2014 .

[79]  Eckhard Quandt,et al.  Giant magnetostrictive multilayers (invited) , 1999 .

[80]  J. Hernando,et al.  Advanced determination of piezoelectric properties of AlN thin films on silicon substrates , 2008, 2008 IEEE Ultrasonics Symposium.

[81]  G. Srinivasan,et al.  Magnetoelectric microwave bandpass filter , 2006 .

[82]  Shashank Priya,et al.  Status and Perspectives of Multiferroic Magnetoelectric Composite Materials and Applications , 2016 .

[83]  Xi Yang,et al.  Significantly Enhanced Inductance and Quality Factor of GHz Integrated Magnetic Solenoid Inductors With FeGaB/ ${\rm Al}_{2}{\rm O}_{3}$ Multilayer Films , 2014, IEEE Transactions on Electron Devices.

[84]  Chen Jianguo,et al.  Review of high temperature piezoelectric materials, devices, and applications , 2018 .

[85]  John G. Jones,et al.  Acoustically actuated ultra-compact NEMS magnetoelectric antennas , 2017, Nature Communications.

[86]  Michael L. Schneider,et al.  Ferromagnetic resonance linewidth in metallic thin films: Comparison of measurement methods , 2006 .

[87]  S. Priya,et al.  Multimodal system for harvesting magnetic and mechanical energy , 2008 .

[88]  Sydney S. Cash,et al.  Highly Sensitive Flexible Magnetic Sensor Based on Anisotropic Magnetoresistance Effect , 2016, Advanced materials.

[89]  E. Quandt,et al.  Optimization of the /spl Delta/E-effect in thin films and multilayers by magnetic field annealing , 2002 .

[90]  S. Dong,et al.  Detection of pico-Tesla magnetic fields using magneto-electric sensors at room temperature , 2006 .

[91]  M. Bibes,et al.  Multiferroics: towards a magnetoelectric memory. , 2008, Nature materials.

[92]  Nicola A. Spaldin,et al.  The Renaissance of Magnetoelectric Multiferroics , 2005, Science.

[93]  John G. Jones,et al.  Soft Magnetism, Magnetostriction, and Microwave Properties of Fe-Ga-C Alloy Films , 2019, IEEE Magnetics Letters.

[94]  Sivaraman Guruswamy,et al.  Large magnetostriction in directionally solidified FeGa and FeGaAl alloys , 2001 .

[95]  M. R. Freeman,et al.  Direct Observation of Magnetic Relaxation in a Small Permalloy Disk by Time-Resolved Scanning Kerr Microscopy , 1997 .

[96]  A. Olabi,et al.  Design and application of magnetostrictive materials , 2008 .

[97]  L. Martin,et al.  Advances in the growth and characterization of magnetic, ferroelectric, and multiferroic oxide thin films , 2010 .

[98]  M. Fiebig Revival of the magnetoelectric effect , 2005 .

[99]  Abdul-Ghani Olabi,et al.  An overview of magnetostriction, its use and methods to measure these properties , 2007 .

[100]  Marc S. Weinberg,et al.  Performance of Electrically Small Conventional and Mechanical Antennas , 2019, IEEE Transactions on Antennas and Propagation.

[101]  Yi Zhang,et al.  NanoNeuroRFID: A Wireless Implantable Device Based on Magnetoelectric Antennas , 2019, IEEE Journal of Electromagnetics, RF and Microwaves in Medicine and Biology.

[102]  S. Dong,et al.  Ultrahigh magnetic field sensitivity in laminates of TERFENOL-D and Pb(Mg1/3Nb2/3)O3–PbTiO3 crystals , 2003 .

[103]  Apurva Mehta,et al.  Giant magnetostriction in annealed Co(1-x)Fe(x) thin-films. , 2011, Nature communications.

[104]  M. Tabib-Azar,et al.  An Electromechanically Modulated Permanent Magnet Antenna for Wireless Communication in Harsh Electromagnetic Environments , 2017, IEEE Transactions on Antennas and Propagation.

[105]  Marilyn Wun-Fogle,et al.  Extraordinary magnetoelasticity and lattice softening in bcc Fe-Ga alloys , 2003 .

[106]  Jeffrey McCord,et al.  Progress in magnetic domain observation by advanced magneto-optical microscopy , 2015 .

[107]  S. Mathews,et al.  Fabrication and characterization of all-thin-film magnetoelectric sensors , 2009 .

[108]  S. Dong,et al.  A tunable ring-type magnetoelectric inductor , 2010 .

[109]  E. Villari,et al.  Ueber die Aenderungen des magnetischen Moments, welche der Zug und das Hindurchleiten eines galvanischen Stroms in einem Stabe von Stahl oder Eisen hervorbringen , 1865 .

[110]  J. Scott,et al.  Data storage. Multiferroic memories. , 2007, Nature materials.

[111]  James Weston,et al.  Growth and magnetic characterization of epitaxial Fe81Ga19∕MgO (100) thin films , 2005 .

[112]  D. G. Lord,et al.  Magnetostriction in polycrystalline sputter‐deposited TbDyFe films , 1994 .

[113]  Nian X. Sun,et al.  Highly Sensitive DC Magnetic Field Sensor Based on Nonlinear ME Effect , 2017, IEEE Sensors Letters.

[114]  Vincent Cros,et al.  Current-induced motion and pinning of domain walls in spin-valve nanowires studied by XMCD-PEEM , 2010 .

[115]  D. Viehland,et al.  Magnetoelectric gyrator , 2009 .

[116]  P. Algarabel,et al.  Giant volume magnetostriction in the FeRh alloy. , 1994, Physical review. B, Condensed matter.

[117]  Eckhard Quandt,et al.  Giant magnetostrictive thin films for applications in microelectromechanical systems (invited) , 2000 .

[118]  Guomin Yang,et al.  Planar Annular Ring Antennas With Multilayer Self-Biased NiCo-Ferrite Films Loading , 2010, IEEE Transactions on Antennas and Propagation.