论文信息 - Calculation of deflection and mechanical stresses in plates of the rectangular form by variational and numerical methods

Calculation of deflection and mechanical stresses in plates of the rectangular form by variational and numerical methods

The influence of tensile and compression in-plane stresses of silicon plate have been investigated. The cases of square and rectangular form of elastic element have been considered. It was shown, that in-plane stresses can have a great influence on plate deflection and stresses distributions, that should be taken into account at designing of piezoresistive pressure sensors.

V.A. Gridchin | A.V. Shaporin | A.D. Byalik | J.H. Lee

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