A read-out strategy and circuit design for high frequency MEMS resonators

This paper describes the implementation of read-out circuitry to characterize a MEMS resonator in the UHF band. A read-out strategy is proposed and explained, detailing the requirement issues. Also, the circuit architecture and design are presented. SPECTRE modeling predictions are compared with current characterization results. A transimpedance gain of 70 dB has been verified, with a cut-off frequency of 450 MHz.

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