Angular stability of cross-shaped-hole arrays metallic filters

Hole arrays metallic filters can be made independent to polarization at normal incidence. However they may lose this property for a non-normal incidence, being dependent to both polar and azimuthal incident angles. These variations of the filter characteristics according to light orientation and polarization are not desirable for most optical applications. Yet, for specific geometric parameters, high-stability can be obtained for cruciform-holes Ag-SiO2 filters. In this article, we propose a review of cross-holes metallic filters, working with CMOS-compatible materials in the visible range. We find out the main geometrical parameters impacting the filters sensitivity to the incident angles and polarization and link their role to spectral stability. We give proper design rules to realize stable filters which may lead to optical sensors with very low spectral variations whatever the incidence and the polarization of the source.

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