An integrated simulator for coupled domain problems in MEMS

An integrated circuit and microfluidic simulator is presented in this paper. It allows coupled simulation of flow, structure, thermal, and electrical domains. The overall architecture and various algorithms including the coupling of the circuit and microfluidic simulators are described. An application of the simulator is demonstrated for a controlled microliquid dosing system using detailed numerical models for the fluid field, a low-dimensional model for the flow sensor, and circuit elements for the electronic control. Unlike other simulators which employ mostly lumped models for the various components, we formulate here a methodology for distributed systems.

[1]  George Em Karniadakis,et al.  Nεκταr code: Dynamic simulations without remeshing , 1999 .

[2]  George Em Karniadakis,et al.  Rarefaction and Compressibility Effects in Gas Microflows , 1996 .

[3]  S. Timoshenko,et al.  THEORY OF PLATES AND SHELLS , 1959 .

[4]  Mona E. Zaghloul,et al.  The design and fabrication of microfluidic flow sensors , 1999, ISCAS'99. Proceedings of the 1999 IEEE International Symposium on Circuits and Systems VLSI (Cat. No.99CH36349).

[5]  Kartikeya Mayaram,et al.  Coupling algorithms for mixed-level circuit and device simulation , 1992, IEEE Trans. Comput. Aided Des. Integr. Circuits Syst..

[6]  Ioannis G. Tollis,et al.  Graph Drawing , 1994, Lecture Notes in Computer Science.

[7]  Hong June Park,et al.  A charge conserving non-quasi-state (NQS) MOSFET model for SPICE transient analysis , 1991, IEEE Trans. Comput. Aided Des. Integr. Circuits Syst..

[8]  Thomas L. Quarles.  THE SPICE3 IMPLEMENTATION GUIDE , 1989 .

[9]  Kartikeya Mayaram,et al.  Algorithms for transient three-dimensional mixed-level circuit and device simulation , 1993, IEEE Trans. Comput. Aided Des. Integr. Circuits Syst..

[10]  Rainald Löhner,et al.  Improved ALE mesh velocities for moving bodies , 1996 .

[11]  R. L. Woodruff,et al.  Three-dimensional numerical simulation of single event upset of an SRAM cell , 1993 .

[12]  John Keown.  Pspice And Circuit Analysis , 1991 .

[13]  John Keown.  Microsim Pspice And Circuit Analysis , 1997 .

[14]  G Gerlach,et al.  Modeling and Design Optimization of a Novel Micropump , 1998 .

[15]  Chenming Hu,et al.  Device-circuit mixed simulation of VDMOS charge transients , 1991 .

[16]  A. Klein,et al.  Modelling Of Piezoelectric Bimorph StructuresUsing An Analog Hardware Description Language , 1970 .

[17]  Donald O. Pederson,et al.  Computer design aids for VLSI circuits , 1981 .

[18]  R. Dutton,et al.  Harmonic balance device analysis of an LDMOS RF power amplifier with parasitics and matching network , 1997, SISPAD '97. 1997 International Conference on Simulation of Semiconductor Processes and Devices. Technical Digest.

[19]  J. Z. Zhu,et al.  The finite element method , 1977 .

[20]  G. Karniadakis,et al.  Spectral/hp Element Methods for CFD , 1999 .

[21]  H. Tilmans.  Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems , 1996 .

[22]  Rainer Laur,et al.  MEDUSA--A Simulator for Modular Circuits , 1982, IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems.

[23]  Gerald Gerlach,et al.  Simulation Of A Complex Sensor System Using Coupled Simulation Programs , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[24]  George Em Karniadakis,et al.  REPORT: A MODEL FOR FLOWS IN CHANNELS, PIPES, AND DUCTS AT MICRO AND NANO SCALES , 1999 .

[25]  Jacob K. White,et al.  Simulating the behavior of MEMS devices: computational methods and needs , 1997 .

[26]  G. Karniadakis,et al.  A Discontinuous Galerkin Method in Moving Domains , 2000 .