论文信息 - Impact of miniaturization on the current handling of electrostatic MEMS resonators - 字舞流文

Impact of miniaturization on the current handling of electrostatic MEMS resonators

T. Kenny | B. Murmann | M. Hopcroft | R. Candler | S. Chandorkar | G. Yama | R. Melamud | M. Agarwal | Bongsang Kim | H. Mehta | G. Bahl