论文信息 - Laser reactive ablation deposition of silicon carbide films - 字舞流文

Laser reactive ablation deposition of silicon carbide films

A. Barborica | I. Mihailescu | A. Luches | P. Mengucci | E. Gyorgy | A. Perrone | M. Martino | G. Majni | G. Leggieri | R. Alexandrescu | I. Mihăilescu