Applications of pattern recognition in semiconductor and printed board production

Abstract Pattern recognition systems are increasingly replacing the human faculty of visual perception in the production sector. This process is accelerated by the necessity to rationalize production and by the changing demands made upon manufacturing techniques by new technologies. General indications obtained from practical experience are given for the design and application of pattern recognition systems in the production sector. They are brought into focus by examples of applications and approaches, classified according to one-, two- and three-dimensional tasks. Primary consideration is given to examples from microtechniques, especially from semiconductor technology.

[1]  Takafumi Miyatake,et al.  An Automatic Position Recognition Technique for LSI Assembly , 1977, IJCAI.

[2]  Masakazu Ejiri,et al.  A Transistor Wire-Bonding System Utilizing Multiple Local Pattern Matching Techniques , 1976, IEEE Transactions on Systems, Man, and Cybernetics.

[3]  Björn Kruse,et al.  Distance checking algorithms , 1979 .

[4]  D. Nyyssonen Optical Linewidth Measurements On Wafers , 1978, Other Conferences.

[5]  Michihiro Mese,et al.  A process for detecting defects in complicated patterns , 1973, Comput. Graph. Image Process..

[6]  Robert C. Restrick An Automatic Optical Printed Circuit Inspection System , 1977, Optics & Photonics.

[7]  J.H. Bruning,et al.  An automated mask inspection system—AMIS , 1975, IEEE Transactions on Electron Devices.