Ion beam sputter deposited W/Si multilayers: Influence of re-sputtering on the interface structure and structure modification at ultra short periods

[1]  Libor Juha,et al.  Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter. , 2006, Physical review letters.

[2]  A. Paul,et al.  Surface morphology for ion-beam sputtered Al layer with varying sputtering conditions , 2006 .

[3]  S. Mohan,et al.  Investigations on the influence of process parameters on the structural evolution of ion beam sputter deposited chromium thin films , 2005 .

[4]  F. Bijkerk,et al.  Ion-induced interface layer formation in W/Si and WRe/Si multilayers , 2005 .

[5]  T. Warwick,et al.  Optics for element-resolved soft X-ray magneto-optical studies , 1999 .

[6]  J. Kortright,et al.  X-ray optical multilayers: Microstructure limits on reflectivity at ultra-short periods , 1998 .

[7]  M. Zeuner,et al.  Particle energy and angle distributions in ion beam sputtering , 1997 .

[8]  T. Mayer,et al.  Thin film and surface characterization by specular X-ray reflectivity , 1997 .

[9]  J. Kirz,et al.  Soft X-ray microscopes and their biological applications , 1995, Quarterly Reviews of Biophysics.

[10]  Eberhard Spiller,et al.  Soft-x-ray optics , 1994, Optical Society of America Annual Meeting.

[11]  Diffraction from multilayer films with partially correlated interfacial roughness , 1992 .

[12]  Daniel G. Stearns,et al.  X‐ray scattering from interfacial roughness in multilayer structures , 1992 .

[13]  R. E. Somekh,et al.  The uhv deposition of short-period multilayers for X-ray mirror applications , 1992 .

[14]  N. N. Salashchenko,et al.  Absolute photometry of pulsed intense fluxes of ultrasoft X-ray radiation , 1991 .

[15]  Finn Erland Christensen,et al.  X-ray study of state-of-the-art small d-spacing W/B4C multilayers , 1991 .

[16]  Hoover.  X-ray/EUV optics for astronomy and microscopy , 1989 .

[17]  M. Wall,et al.  Subnanometer multilayers for x‐ray mirrors: Amorphous crystals , 1989 .

[18]  B. Vidal,et al.  X‐ray reflectivity and transmission electron microscopy studies on thin and ultrathin W/C and W/Si multilayers structures , 1989 .

[19]  L. G. Parratt.  Surface Studies of Solids by Total Reflection of X-Rays , 1954 .