MEMS variable optical attenuator using low driving voltage for DWDM systems
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A silicon microelectromechanical system (MEMS) variable optical attenuator with fibre connection is reported. The device requires only 8 V driving voltage. It has only 1.5 dB insertion loss, but 45 dB dynamic range, 37 ms response time, and 0.9 dB wavelength dependence loss over the C-band (1528–1561 nm).
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