Model and design considerations for multistage electrostatic microgenerators

Electrostatic energy harvesters powered by ambient motion and integrated at the microscale are an attractive replacement for batteries in small, low-power electronic devices. This paper contains model and design considerations for electrostatic generators based on mechanically-variable capacitors. The performance of single-stage and multistage microgenerators are compared. The main design trade-offs and the improvement of conversion efficiency are illustrated through design considerations and simulation results.