Fabrication of complex shape 3D photonic nanostructures by FIB lithography

We report fabrication of complex 3D shape nanostructures by single-pass focused ion beam milling of freely suspended metal foils and films on dielectric substrates. The approach benefits from the accuracy in nano fabrication and decreased overdeposition. The fabricated nanostructured thin films posses optical properties valuable for photonic applications: extraordinary transmission and extreme chirality.

[1]  Stefan Linden,et al.  Giving light yet another new twist , 2009 .

[2]  Symmetry-selective third-harmonic generation from plasmonic metacrystals. , 2014, Physical review letters.

[3]  T. Higuchi,et al.  Polarization-controlled circular second-harmonic generation from metal hole arrays with threefold rotational symmetry. , 2014, Physical Review Letters.

[4]  D. Bergman,et al.  Surface plasmon amplification by stimulated emission of radiation: quantum generation of coherent surface plasmons in nanosystems. , 2003, Physical review letters.

[5]  Harald Giessen,et al.  Nanoantenna-enhanced gas sensing in a single tailored nanofocus , 2011, CLEO: 2011 - Laser Science to Photonic Applications.

[6]  W. Cai,et al.  Plasmonics for extreme light concentration and manipulation. , 2010, Nature materials.

[7]  Maxim V. Gorkunov,et al.  Theory of extraordinary light transmission through arrays of subwavelength slits , 2008 .

[8]  O. Y. Rogov,et al.  Causality relations for materials with strong artificial optical chirality , 2014, 1408.4977.

[9]  Xiangang Luo,et al.  Plasmonic nanoresonators for high-resolution colour filtering and spectral imaging. , 2010, Nature communications.

[10]  P. Melentiev,et al.  Giant optical nonlinearity of a single plasmonic nanostructure. , 2013, Optics express.

[11]  O. Y. Rogov,et al.  Implications of the causality principle for ultra chiral metamaterials , 2015, Scientific Reports.

[12]  Alexandre G. Brolo,et al.  Plasmonics for future biosensors , 2012, Nature Photonics.

[13]  S. Yudin,et al.  Tarnishing of silver subwavelength slit gratings and its effect on extraordinary optical transmission , 2014 .

[14]  O. Y. Rogov,et al.  Extreme optical activity and circular dichroism of chiral metal hole arrays , 2014, 1404.7615.

[15]  H. Lezec,et al.  Extraordinary optical transmission through sub-wavelength hole arrays , 1998, Nature.

[16]  Vladimir M. Shalaev,et al.  Optical Metamaterials: Fundamentals and Applications , 2009 .