论文信息 - Vacuum ultra-violet emission of CF4 and CF3I containing plasmas and Their effect on low-k materials - 字舞流文

Vacuum ultra-violet emission of CF4 and CF3I containing plasmas and Their effect on low-k materials

J. de Marneffe | M. Baklanov | A. Zotovich | J. Marneffe | V. Samara | Z. E. Otell | T. Hansen | Z. el Otell