Piezoelectric Micromachined Ultrasonic Transducers Based on PZT Films
暂无分享,去创建一个
[1] K. Parker,et al. IEEE Ultrasonic Symposium , 1986 .
[2] K.K. Li,et al. Micromachined high frequency ferroelectric sonar transducers , 1997, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.
[3] Abdullah Atalar,et al. Silicon micromachined ultrasonic immersion transducers , 1996 .
[4] Paul Muralt,et al. Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films , 1999 .
[5] Nava Setter,et al. Interferometric measurements of electric field-induced displacements in piezoelectric thin films , 1996 .
[6] Abdullah Atalar,et al. Micromachined two-dimensional array piezoelectrically actuated transducers , 1998 .