Texture Development, Microstructure Evolution, and Crystallization of Chemically Derived PZT Thin Films

Two solution-based methods, metallo-organic decomposition and sol‐gel processes, were used to study the effects of precursor solution type on the microstructure evolution and texture development of oriented PZT films. Microstructure development and perovskite content are strongly dependent on the heating rate. Fast heating rate forms a dense fine-grained microstructure with (111) orientation. Intermediate-temperature pyrolysis followed by a fast heating rate forms clustered or island structures of submicrometer grains with (100) orientation. Intermediatetemperature pyrolysis followed by a very slow heating rate forms larger spherical rosettes with random orientations. Pt5‐7Pb is a (111) textured transient intermetallic phase that nucleates PZT(111) texture. PbO is a (001) textured layer compound that nucleates PZT(100) texture. The texture selection of PZT films is independent of precursor systems but sensitive to the film thickness especially when sol‐gel precursors and oxidizing atmosphere are used. Correlation and comparison of oriented sol‐gel and MOD PZT films with electrical properties are also made.

[1]  H. D. Keith,et al.  Spherulitic Crystallization from the Melt. I. Fractionation and Impurity Segregation and Their Influence on Crystalline Morphology , 1964 .

[2]  J. Fukushima,et al.  Preparation of ferroelectric PZT films by thermal decomposition of organometallic compounds , 1984 .

[3]  K. Budd,et al.  SOL-GEL PROCESSING OF PbTiO//3, PbZrO//3, PZT, AND PLZT THIN FILMS. , 1985 .

[4]  D. J. Coleman,et al.  Effects of Hydrolysis On Metallo-Organic Solution Deposition of PZT FILMS , 1986 .

[5]  S. Myers,et al.  Microstructural Characterization of Ferroelectric Thin Films for Non-Volatile Memory Applications , 1990 .

[6]  J. Mackenzie,et al.  Crystallization Kinetics Of Metallo-Organics Derived Pzt Thin Film , 1990 .

[7]  D. Payne,et al.  An investigation into the factors affecting the sol-gel processing of PZT thin layers , 1990, [Proceedings] 1990 IEEE 7th International Symposium on Applications of Ferroelectrics.

[8]  M. Klee,et al.  Ferroelectric layers made by thermal decomposition of organometallic compounds , 1990, [Proceedings] 1990 IEEE 7th International Symposium on Applications of Ferroelectrics.

[9]  R. Vest.  Metallo-organic decomposition (MOD) processing of ferroelectric and electro-optic films : a review , 1990 .

[10]  D. Doughty,et al.  Microstructure of Solution‐Processed Lead Zirconate Titanate (PZT) Thin Films , 1991 .

[11]  G. Haertling.  Plzt thin films prepared from acetate precursors , 1991 .

[12]  M. J. E. Ulenaers,et al.  Preparation and ferroelectric properties of PbZr0.53Ti0.47O3 thin films by spin coating and metalorganic decomposition , 1991 .

[13]  C. L. Hernandez,et al.  Microstructural evolution of Pb(Zr, Ti)O_3 thin films prepared by hybrid metallo-organic decomposition , 1992 .

[14]  Rainer Waser,et al.  Processing and electrical properties of Pb (ZrxTi1−x)O3 (x=0.2–0.75) films: Comparison of metallo‐organic decomposition and sol‐gel processes , 1992 .

[15]  David R. Tallant,et al.  Solution chemistry effects in Pb(Zr, Ti)O3 thin film processing , 1992 .

[16]  K. Kikuta,et al.  Synthesis of Highly Oriented Lead Zirconate–Lead Titanate Film Using Metallo‐organics , 1992 .

[17]  S. Desu,et al.  Modified sol-gel process for preparation of lead zjrconate titanate thin films , 1993 .

[18]  Katsuhiro Aoki,et al.  Preparation of <100>-oriented Lead-Zirconate-Titanate Films by Sol-Gel Technique , 1993 .

[19]  P. Larsen,et al.  Influence of platinum-based electrodes on the microstructure of sol-gel and MOD prepared lead zirconate titanate films , 1993 .

[20]  I-Wei Chen,et al.  Temperature–Time Texture Transition of Pb(Zr1−xTix)O3 Thin Films: I, Role of Pb-rich Intermediate Phases , 1994 .

[21]  N. Setter,et al.  Use of Transmission Electron Microscopy for the Characterization of Rapid Thermally Annealed, Solution‐Gel, Lead Zirconate Titanate Films , 1994 .

[22]  I-Wei Chen,et al.  Temperature–Time Texture Transition of Pb(Zr1−xTix)O3 Thin Films: II, Heat Treatment and Compositional Effects , 1994 .

[23]  Nava Setter,et al.  Orientation of rapid thermally annealed lead zirconate titanate thin films on (111) Pt substrates , 1994 .

[24]  Investigation of Pb(Zr 0.70 Ti 0.30 )O 3 thin films of different textures on Ti/Pt electrodes , 1995 .

[25]  Yimin Liu,et al.  Nucleation‐ or Growth‐Controlled Orientation Development in Chemically Derived Ferroelectric Lead Zirconate Titanate (Pb(ZrxTi1−x)O3, x= 0.4) Thin Films , 1996 .

[26]  I-Wei Chen,et al.  Comparative Role of Metal-Organic Decomposition-Derived [100] and [111] in Electrical Properties of Pb(Zr, Ti)O3 Thin Films , 1997 .