Large signal performance of ferroelectric FBARs

Ferroelectric thin film bulk acoustic wave resonators (FBARs) have been of growing interest due to their electric field dependent properties. Resonators based on the ferroelectric barium strontium titanate (BaxSr(1−x)TiO3, BST) are intrinsically switchable, namely they have resonances that switch on with the application of a dc bias voltage. In this paper, the large signal performance and nonlinear behavior of BST FBARs are investigated. Measurement results show as the dc bias voltage increases, the nonlinear behavior due to high RF input power decreases. For better understanding, measurement results of BST FBARs are fitted to a nonlinear modified Butterworth-Van Dyke (MBVD) model with respect to dc bias voltage and RF input power.

[1]  Martin Handtmann,et al.  Behavior of BAW devices at high power levels , 2005, IEEE MTT-S International Microwave Symposium Digest, 2005..

[2]  S. Gevorgian,et al.  Parameter extraction for tunable TFBARs based on BaxSr1−xTiO3 , 2009, 2009 IEEE MTT-S International Microwave Symposium Digest.

[3]  W. Palmer,et al.  Tunable Dielectrics for RF Circuits , 2009 .

[4]  A. Mortazawi,et al.  A ferroelectric-based impedance tuner for adaptive matching applications , 2008, 2008 IEEE MTT-S International Microwave Symposium Digest.

[5]  Dong S. Shim,et al.  A general nonlinear Mason model of arbitrary nonlinearities in a piezoelectric film , 2010, 2010 IEEE International Ultrasonics Symposium.

[6]  Robert A. York,et al.  Strontium titanate DC electric field switchable and tunable bulk acoustic wave solidly mounted resonator , 2008, 2008 IEEE MTT-S International Microwave Symposium Digest.

[7]  R. Weigel,et al.  Reduced Size Frequency Agile Microwave Circuits Using Ferroelectric Thin-Film Varactors , 2008, IEEE Transactions on Microwave Theory and Techniques.

[8]  S. Gevorgian,et al.  Tunable Solidly Mounted Thin Film Bulk Acoustic Resonators Based on Ba$_{x}{{\hbox{Sr}}_{1-x}}{\hbox{TiO}}_{3}$ Films , 2007, IEEE Microwave and Wireless Components Letters.

[9]  A. Mortazawi,et al.  A DC Voltage Dependant Switchable Thin Film Bulk Wave Acoustic Resonator Using Ferroelectric Thin Film , 2007, 2007 IEEE/MTT-S International Microwave Symposium.

[10]  David Galt,et al.  Nonlinear behavior of thin film SrTiO3 capacitors at microwave frequencies , 1998 .

[11]  A. Tagantsev,et al.  Electrical tuning of dc bias induced acoustic resonances in paraelectric thin films , 2008 .

[12]  Irina Vendik,et al.  Modeling tunable bulk acoustic resonators based on induced piezoelectric effect in BaTiO[sub 3] and Ba[sub 0.25]Sr[sub 0.75]TiO[sub 3] films , 2008 .