Comparative Study of Hydrogen Sensing Characteristics of a Pd/GaN Schottky Diode in Air and N2 Atmospheres

Abstract The hydrogen sensing and response characteristics of an interesting Pd/GaN Schottky diode under different concentration of hydrogen gases were systematically studied over a wide temperature range both in air and N2 atmospheres. During the hydrogen adsorption process, due to the presence of oxygen adsorbates on the Pd surface, the additional hydroxyl and water products were suggested to affect the H2 response of the sensors upon exposure to air. It revealed that the reaction of water formation appeared to be the rate-limiting factor and further inhibited the appearance of a dipolar layer at the Pd/GaN interface. Accordingly, the studied Pd/GaN Schottky diode exhibited higher hydrogen detection capability and larger Schottky barrier height modulation in N2 atmosphere in comparison with those in air. Based on the equilibrium adsorption analysis, the hydrogen adsorption heat ΔH° values were −18.24 and −24.74 kJ/mol in air and N2 atmospheres, respectively. Thus, the hydrogen detection capability was decreased with elevating the temperature. However, this phenomenon was more serious in air. In addition, according to the kinetic adsorption analysis, the activation energy Ea values were 34.86 and 4.53 kJ/mol in air and N2 atmospheres, respectively. This implied that the studied device could also perform more rapid detection of hydrogen in N2 atmosphere.

[1]  S. Maier Plasmonics: Fundamentals and Applications , 2007 .

[2]  Wen-Chau Liu,et al.  Hydrogen-sensitive characteristics of a novel Pd/InP MOS Schottky diode hydrogen sensor , 2001 .

[3]  Wen-Chau Liu,et al.  Investigation of hydrogen-sensing properties of Pd/AlGaAs-based Schottky diodes , 2003 .

[4]  R. Gaska,et al.  High-temperature performance of AlGaN/GaN HFETs on SiC substrates , 1997, IEEE Electron Device Letters.

[5]  Wu Lu,et al.  Pt-AlGaN∕GaN Schottky diodes operated at 800°C for hydrogen sensing , 2005 .

[6]  Ingemar Lundström,et al.  A model of the Temkin isotherm behavior for hydrogen adsorption at Pd–SiO2 interfaces , 1997 .

[7]  Ingemar Lundström,et al.  BRIDGING THE PRESSURE GAP FOR PALLADIUM METAL-INSULATOR-SEMICONDUCTOR HYDROGEN SENSORS IN OXYGEN CONTAINING ENVIRONMENTS , 1998 .

[8]  Makoto Egashira,et al.  H2 sensing properties and mechanism of anodically oxidized TiO2 film contacted with Pd electrode , 2003 .

[9]  Yean-Kuen Fang,et al.  Trench Pd/Si metal‐oxide‐semiconductor Schottky barrier diode for a high sensitivity hydrogen gas sensor , 1990 .

[10]  Wen-Chau Liu,et al.  Characteristics of Pd/InGaP Schottky diodes hydrogen sensors , 2004 .

[11]  Ingemar Lundström,et al.  Chemical sensors with catalytic metal gates , 1996 .

[12]  Harry A. Atwater The promise of plasmonics. , 2007 .

[13]  F. Ren,et al.  Thermal stability of W ohmic contacts to n‐type GaN , 1996 .

[14]  Kun-Wei Lin,et al.  Comparative Hydrogen-Sensing Study of Pd/GaAs and Pd/InP Metal-Oxide-Semiconductor Schottky Diodes , 2001 .

[15]  Stephen J. Pearton,et al.  Reversible barrier height changes in hydrogen-sensitive Pd/GaN and Pt/GaN diodes , 2003 .

[16]  T. Hsiang,et al.  Very fast metal-semiconductor-metal ultraviolet photodetectors on GaN with submicron finger width , 2003, IEEE Photonics Technology Letters.

[17]  Martin Eickhoff,et al.  Hydrogen response mechanism of Pt-GaN Schottky diodes , 2002 .

[18]  S. M. Sze,et al.  Physics of semiconductor devices , 1969 .

[19]  Vinayak Tilak,et al.  Pt/GaN schottky diodes for hydrogen gas sensors , 2006 .

[20]  R. C. Weast Handbook of chemistry and physics , 1973 .

[21]  Stephen J. Pearton,et al.  Comparison of MOS and Schottky W/Pt–GaN diodes for hydrogen detection , 2005 .

[22]  T. Akin,et al.  A modular micromachined high-density connector system for biomedical applications , 1999, IEEE Transactions on Biomedical Engineering.

[23]  S. D. Wolter,et al.  High temperature Pt Schottky diode gas sensors on n-type GaN , 1999 .

[24]  K. Doverspike,et al.  High-power microwave GaN/AlGaN HEMTs on semi-insulating silicon carbide substrates , 1999, IEEE Electron Device Letters.

[25]  N. Grandjean,et al.  Multilayer (Al,Ga)N structures for solar-blind detection , 2004, IEEE Journal of Selected Topics in Quantum Electronics.

[26]  Huey-Ing Chen,et al.  Comprehensive study of adsorption kinetics for hydrogen sensing with an electroless-plated Pd–InP Schottky diode , 2003 .

[27]  Kun-Wei Lin,et al.  A new Pd-oxide-Al/sub 0.3/Ga/sub 0.7/As MOS hydrogen sensor , 2003 .

[28]  Mats Eriksson,et al.  Hydrogen adsorption states at the Pd/SiO2 interface and simulation of the response of a Pd metal–oxide–semiconductor hydrogen sensor , 1998 .

[29]  Andreas Mandelis,et al.  Solid‐state sensors for trace hydrogen gas detection , 1990 .

[30]  Stephen J. Pearton,et al.  AlGaN/GaN-based metal-oxide semiconductor diode-based hydrogen gas sensor , 2004 .

[31]  K. Najafi,et al.  Special topic section on microtechniques, microsensors, microactuators, and microsystems , 2000, IEEE Transactions on Biomedical Engineering.