论文信息 - Investigation of Barrier Property of Amorphous Co–Ti Layer as Single Barrier/Liner in Local Co Interconnects - 字舞流文

Investigation of Barrier Property of Amorphous Co–Ti Layer as Single Barrier/Liner in Local Co Interconnects

Tianchun Ye | Yaodong Liu | Jianfeng Gao | A. Du | J. Xu | Jun Luo | Junfeng Li | Chao Zhao | Wenwu Wang | Dapeng Chen | Shihai Gu | Dan Zhang | S. Mao | Xue Luo | Yongliang Li | Jing Xu