Restraint of tool path ripple based on the optimization of tool step size for sub-aperture deterministic polishing
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Zhenzhong Wang | Qiao Xu | C. Wang | W. Yang | S. Ye | P. Yang | Y. Peng | Y. Guo | Zhenzhong Wang | Qiao Xu | Y. Peng | S. Ye | C. Wang | Y. Guo | W. Yang | P. Yang
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