압전 액추에이터 구동형 다이어프램 펌프 개발

This paper describes a piezoelectric pump using the silicon diaphragm with aluminum plate and spring. The piezoelectric pump uses a hinge-lever mechanism to amplify the displacement of multilayered PZT actuator. No-load flow rate and load characteristic of fabricated piezoelectric pump were tested. The fabricated piezoelectric pump of 80 ㎜ diameter and 65 ㎜ length achieves maximum flow rate and output pressure of 790 ㎖/min and 9.7 kPa, respectively, at an applied voltage of 100 V and operating frequency of 6 ㎐. Future works will focus on the application of the liquid cooling system for heat rejection of high power electronic devices existing in computers and fuel cell etc.