Development of Si-based electrical biosensors: Simulations and first experimental results

Abstract In this work, we simulated and experimentally assessed the possibility to detect, through electrical transduction, hybridization of DNA molecules on MOS-like devices, having different dielectrics: SiO 2 , Si 3 N 4 and SiO 2 /Si 3 N 4 /SiO 2 (ONO). The electrical characterization was performed after the various functionalization steps, consisting of dielectric activation, silanization, DNA spotting and anchoring, and after the hybridization process, to test the devices effectiveness as DNA recognition biosensors. The experimental results were used to validate device simulations. The comparison shows the ability to determine a priori the DNA probe density needed to maximize the response. The results confirm that the structures analyzed are sensitive to the immobilization of DNA and its hybridization.

[1]  Yuji Miyahara,et al.  Immobilization of oligonucleotide probes on Si3N4 surface and its application to genetic field effect transistor , 2004 .

[2]  S. Conoci,et al.  Synthesis, DNA binding properties and electrochemistry towards an electrode-bound DNA of a novel anthracene–viologen conjugate , 2014 .

[3]  S. K. Moore.  Making chips to probe genes , 2001 .

[4]  Sabrina Conoci,et al.  Integrated PCR amplification and detection processes on a Lab-on-Chip platform: a new advanced solution for molecular diagnostics , 2010, Clinical chemistry and laboratory medicine.

[5]  Michael J. Schöning,et al.  Bio FEDs (Field‐Effect Devices): State‐of‐the‐Art and New Directions , 2006 .

[6]  Thomas Laurell,et al.  Microfluidic biosensing systems. Part I. Development and optimisation of enzymatic chemiluminescent micro-biosensors based on silicon microchips. , 2004, Lab on a chip.

[7]  Sebania Libertino,et al.  Silicon photomultipliers applications to biosensors , 2014, Photonics West - Optoelectronic Materials and Devices.

[8]  W. Fritzsche,et al.  Chip-based electrical detection of DNA. , 2005, IEE proceedings. Nanobiotechnology.

[9]  Sabrina Conoci,et al.  Biosensor integration on Si-based devices: Feasibility studies and examples , 2013 .

[10]  Sebania Libertino,et al.  Feasibility Studies on Si-Based Biosensors , 2009, Sensors.

[11]  B. Eitan,et al.  NROM: A novel localized trapping, 2-bit nonvolatile memory cell , 2000, IEEE Electron Device Letters.

[12]  Eugenio Martinelli,et al.  Sensors small and numerous: always a winning strategy? , 2005 .

[13]  N. Jaffrezic‐Renault,et al.  Direct detection of immunospecies by capacitance measurements. , 1988, Analytical chemistry.