论文信息 - Ultrathin-body Ge-on-insulator wafers fabricated with strongly bonded thin Al2O3/SiO2 hybrid buried oxide layers - 字舞流文

Ultrathin-body Ge-on-insulator wafers fabricated with strongly bonded thin Al2O3/SiO2 hybrid buried oxide layers

K. Ikeda | Y. Kamimuta | T. Tezuka | Yoshiaki Nakamura | K. Izunome | Y. Moriyama | S. Takeuchi | A. Sakai | Y. Nakamura