论文信息 - Uniformity of film thickness on rotating planetary planar substrates - 字舞流文

Uniformity of film thickness on rotating planetary planar substrates

T. Radha | B. Ramprasad

[1] T. Radha,et al. An Algorithm for Optimization of Experimental Parameters for Maximum Uniformity of Film Thickness , 1972 .

[2] D. Doughty,et al. Fabrication of multilayer dielectric films. , 1966 .

[3] C. Hopkins,et al. The performance of a small rotating substrate holder for vacuum deposition , 1964 .

[4] K. Mielenz. Tolerances For Layer Thicknesses in Dielectric Multilayer Coatings and Interference Filters , 1960, Journal of research of the National Bureau of Standards. Section A, Physics and chemistry.

[5] W. Steckelmacher,et al. The distribution of thin films condensed on surfaces by the vacuum evaporation method , 1952 .

[6] L. Holland,et al. Vacuum deposition of thin films , 1956 .