구름 요소를 사용하는 LM 가이드에서의 마이크로스케일 진동현상

Linear motion ( LM) guides having rolling elements have been used to position precision machines accurately. For ultra-accurate Positioning control of Precision machines, the understanding of the dynamic behavior of the LM guide at the macro and/or micro scales is most critical, but the research on this subject is rare. The objective of the present research is to investigate the vibration phenomena of the LM guide where balls are used as the rolling elements. Several experiments show the nonlinear characteristics of the LM guide such as hysteresis behavior and force-dependent natural frequencies phenomena.