论文信息 - Influence of the reactive gas flow on chromium nitride sputtering - 字舞流文

Influence of the reactive gas flow on chromium nitride sputtering

G. N. Pedersen | H. Jensen | U. Jensen | G. S∅rensen

[1] B. K. Gupta,et al. Ion bombardment of AlN films deposited in a reactive sputtering process with accurate control of the mass flow of the reactive gas , 1992 .

[2] G. Sorensen,et al. The influence of the reactive gas flow on the properties of AIN sputter-deposited films , 1991 .

[3] W. Münz,et al. PROPERTIES OF CrN AND (Ti, Al)N COATINGS PRODUCED BY HIGH RATE SPUTTER DEPOSITION , 1987 .

[4] R. Gillet,et al. Hard chrome coatings deposited by physical vapour deposition , 1983 .