Gray-tone blankmask, photomask and manufacturing method thereof

The invention allows to manufacture a gray-tone photo-mask, the rear reflectivity high in order to facilitate a flat panel display or a photomask alignment in a semiconductor device for producing an exposure equipment such as a liquid crystal display device, gray tone blank mask, a photomask and a process for producing It provides a method. On the transparent substrate of the present invention, the portion that the positioning pattern formed on the photomask gray tone so as not to form a low reflection film or a semi-transmissive or highly reflective so that the light-shielding film and removing position. This makes it possible to increase the reflectance of the rear portion of the positioning pattern formed thereby facilitating the positioning. A liquid crystal display device, the blank mask, photomasks, semi-permeable membrane, the aligning