Ruthenium interconnects with 58 nm2 cross-section area using a metal-spacer process
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Christopher J. Wilson | Christoph Adelmann | Jürgen Bömmels | Kristof Croes | Geraldine Jamieson | Zsolt Tőkei | Shibesh Dutta | Shreya Kundu | Anshul Gupta | Lianggong Wen
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