论文信息 - A high sensitivity micromachined accelerometer with an enhanced inertial mass SOI MEMS process - 字舞流文

A high sensitivity micromachined accelerometer with an enhanced inertial mass SOI MEMS process

Weizheng Yuan | Jianbing Xie | Meng Song | Jianbing Xie | W. Yuan | Mengyu Song | Meng Song