论文信息 - Transitioning of direct e-beam write technology from research and development into production flow

Transitioning of direct e-beam write technology from research and development into production flow

The electron beam direct write (EBDW) lithography solution is already mature enough to be used for semiconductor manufacturing. This paper illustrates the potential of EBDW to support technology development as a patterning technique complementary to the projection optical lithography. The first classical application of EBDW lithography is to support the research and development efforts (R&D) well before the optical scanners with required resolution are available. EBDW can potential lower the cost of manufacturing by eliminating very expensive masks for critical layers. Benefits of mask less solution in terms of cycle time, flexibility is presented through integration examples confirming the potential of this technique for semiconductor manufacturing.

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