On the selectivity of nanostructured semiconductor gas sensors

Different methods are presented for improving chemical selectivity and sensitivity of semiconductor gas sensors consisting of nanostructured thin films. Pure and doped WO 3 nanoparticles, forming nanoporous layers, are used as test material. The chemical selectivity is increased by applying different operating temperatures, using temperature modulation and pattern recognition methods, and by a fluctuation enhanced spectroscopy technique. The selectivity improvement of a fluctuation enhanced sensor is compared to that of a classical resistive sensor.

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