Iop Publishing Journal of Micromechanics and Microengineering Compact Model of Squeeze-film Damping Based on Rarefied Flow Simulations

A new compact model of squeeze-film damping is developed based on the numerical solution of the Boltzmann kinetic equation. It provides a simple expression for the damping coefficient and the quality factor valid through the slip, transitional and free-molecular regimes. In this work, we have applied statistical analysis to the current model using the chi-squared test. The damping predictions are compared with both Reynolds equation-based models and experimental data. At high Knudsen numbers, the structural damping dominates the gas squeeze-film damping. When the structural damping is subtracted from the measured total damping force, good agreement is found between the model predictions and the experimental data.

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