Design and realization of a long-stroke translation stage for SPM

A new traceable metrological AFM with a measuring volume of 1x1x1 mm is being developed for the Dutch metrology institute (NMi - Van Swinden Laboratory). The instrument consists of a low-hysteresis elastic translation stage and a custom designed, kinematically mounted AFM measurement head. Here a short overview of the translation stage design will be given and some preliminary results presented.