Preparation of n-CuO nanostructural films by thermal oxidation/PVD method

CuO films compose of copper oxide nanorods and nanograins with fcc type of structure have been prepared by multistep PVD / thermal oxidation method at different temperatures of annealing (400, 500and 600 °C). Ni-C nanocatalyst films was the factor lowering temperature and duration time of thermal oxidation (in comparison with literature data for similar methods) in which nanorods have been obtained. Obtained nanostructural films (composed of 1D and 2D objects) were characterized with XRD, SEM, EDX and Raman spectroscopy. All applied methods proved that the CuO nanostructural film is formed due to thermal oxidation of prepared multilayer film.

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