A Silicon-Based Shape Memory Alloy Microvalve

A new actuator for silicon micro-valves has been developed and tested. A thin film shape memory alloy provides for large deflections with high speed, low power, and small size. The actuator is batch fabricated with planar processes.

[1]  W. Benecke,et al.  Microfabricated actuator with moving permanent magnet , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.

[2]  James B. Angell,et al.  A microminiature fluidic amplifier , 1988 .

[3]  H. Jerman,et al.  Electrically-activated, normally-closed diaphragm valves , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.