A compact ultrasonic motor using two in plane modes

To meet the need of improving requirements for compact actuators in precision driving, a novel linear ultrasonic motor was proposed in this paper. The principle of this motor was introduced. With the help of commercial finite element analysis software ANSYS, finite element model of the stator of the ultrasonic motor was built and mode analysis was conduct to obtain an optimum design. A prototype was made and tested to verify simulation results. Testing results of the prototype shows that this motor can gain a maximum speed of 245mm/s and its thrust can reach 1.6N.