论文信息 - Direct characterization of ZnO films in composite resonators by the resonance spectrum method

Direct characterization of ZnO films in composite resonators by the resonance spectrum method

A direct method to characterize a piezoelectric film has been developed. Based on the measured resonance spectrum of a composite resonator, the electromechanical coupling coefficient k/sub t//sup 2/, density and elastic constant C/sub 33//sup D/ of the piezoelectric film can be derived. Good agreement with experiment was obtained.

F. S. Hickernell | Z. Wang | J.D.N. Cheeke | Y. Zhang

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