论文信息 - PECVD based silicon oxynitride thin films for nano photonic on chip interconnects applications. - 字舞流文

PECVD based silicon oxynitride thin films for nano photonic on chip interconnects applications.

Dinesh Kumar | S. Sharma | P. K. Dwivedi | Vikram Singh | Sumit Barthwal | Anuj Kumar | B. Prasad | P. Dwivedi | D. Kumar